摘要
The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.
| 原文 | English |
|---|---|
| 主出版物標題 | Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC |
| 頁面 | 298-299 |
| 頁數 | 2 |
| DOIs | |
| 出版狀態 | Published - 2007 十二月 1 |
| 事件 | s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan 持續時間: 2007 十一月 5 → 2007 十一月 8 |
出版系列
| 名字 | Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC |
|---|
Other
| Other | s20th International Microprocesses and Nanotechnology Conference, MNC 2007 |
|---|---|
| 國家 | Japan |
| 城市 | Kyoto |
| 期間 | 07-11-05 → 07-11-08 |
指紋
All Science Journal Classification (ASJC) codes
- Hardware and Architecture
- Electrical and Electronic Engineering
引用此文
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Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. / Hsiao, Fei Bin; Lee, Yung Chun; Chuang, Cheng Hsin; Ruan, Jun Yi.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 298-299 4456222 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).研究成果: Conference contribution
TY - GEN
T1 - Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures
AU - Hsiao, Fei Bin
AU - Lee, Yung Chun
AU - Chuang, Cheng Hsin
AU - Ruan, Jun Yi
PY - 2007/12/1
Y1 - 2007/12/1
N2 - The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.
AB - The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.
UR - http://www.scopus.com/inward/record.url?scp=47349120936&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=47349120936&partnerID=8YFLogxK
U2 - 10.1109/IMNC.2007.4456222
DO - 10.1109/IMNC.2007.4456222
M3 - Conference contribution
AN - SCOPUS:47349120936
SN - 4990247248
SN - 9784990247249
T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
SP - 298
EP - 299
BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
ER -