Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures

Fei Bin Hsiao, Yung-Chun Lee, Cheng Hsin Chuang, Jun Yi Ruan

研究成果: Conference contribution

摘要

The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.

原文English
主出版物標題Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
頁面298-299
頁數2
DOIs
出版狀態Published - 2007
事件s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
持續時間: 2007 十一月 52007 十一月 8

Other

Others20th International Microprocesses and Nanotechnology Conference, MNC 2007
國家Japan
城市Kyoto
期間07-11-0507-11-08

指紋

Molds
Lasers
Quartz

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

引用此文

Hsiao, F. B., Lee, Y-C., Chuang, C. H., & Ruan, J. Y. (2007). Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. 於 Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (頁 298-299). [4456222] https://doi.org/10.1109/IMNC.2007.4456222
Hsiao, Fei Bin ; Lee, Yung-Chun ; Chuang, Cheng Hsin ; Ruan, Jun Yi. / Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. 頁 298-299
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Hsiao, FB, Lee, Y-C, Chuang, CH & Ruan, JY 2007, Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. 於 Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456222, 頁 298-299, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 07-11-05. https://doi.org/10.1109/IMNC.2007.4456222

Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. / Hsiao, Fei Bin; Lee, Yung-Chun; Chuang, Cheng Hsin; Ruan, Jun Yi.

Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 298-299 4456222.

研究成果: Conference contribution

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Hsiao FB, Lee Y-C, Chuang CH, Ruan JY. Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures. 於 Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 298-299. 4456222 https://doi.org/10.1109/IMNC.2007.4456222