Investigation on laser assisted direct imprinting parameters for fabricating micro-and nano- structures

Fei Bin Hsiao, Yung Chun Lee, Cheng Hsin Chuang, Jun Yi Ruan

研究成果: Conference contribution

摘要

The laser assisted direct imprint (LADI) technique can be perfectly carried out by using the quartz nano-negative molds. The effects of feature size are experimental verified by micro-positive molds as well.

原文English
主出版物標題Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
頁面298-299
頁數2
DOIs
出版狀態Published - 2007
事件s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
持續時間: 2007 11月 52007 11月 8

出版系列

名字Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Others20th International Microprocesses and Nanotechnology Conference, MNC 2007
國家/地區Japan
城市Kyoto
期間07-11-0507-11-08

All Science Journal Classification (ASJC) codes

  • 硬體和架構
  • 電氣與電子工程

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