Investigations of novel Γ-gate MOS-HEMTs by ozone water oxidation and shifted exposure techniques

Ching Sung Lee, Bo Yi Chou, Sheng Han Yang, Wei Chou Hsu, Chang Luen Wu, Wen Luh Yang, Don Gey Liu, Ming Yuan Lin

研究成果: Article同行評審

11 引文 斯高帕斯(Scopus)

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Chemical Compounds

Engineering & Materials Science