Isolation on Si wafers by MeV proton bombardment for RF integrated circuits

Lurng Shehng Lee, Chungpin Liao, Chung Len Lee, Tzuen His Huang, Denny Duan Lee Tang, Ting Shien Duh, Tsing Tyan Yang

研究成果: Article同行評審

37 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds