Isopropyl alcohol sensors of CuO nanotubes by thermal oxidation of copper films on glass

Han Ting Hsueh, Shoou Jinn Chang, Fei Yi Hung, Wen Yin Weng, S. P. Chang, T. J. Hsueh, Cheng Liang Hsu, Bau Tong Dai

研究成果: Article同行評審

7 引文 斯高帕斯(Scopus)

摘要

The growth of CuO nanotubes on Cu/CuO/glass templates is reported. It was found that porous structures were formed at the interface between sputtered CuO film and Cu layer after annealing. The average length of the nanotubes and thickness of the porous structure both increased monotonically as we increased the initial thickness of the copper film. The CuO nanotubes were used to fabricate isopropyl alcohol (IPA) sensors. With a 5-V applied bias, the current became smaller as the IPA was injected into the sealed test chamber. Furthermore, the measured response was larger for the sensors with longer CuO nanotubes.

原文English
文章編號5770164
頁(從 - 到)3276-3282
頁數7
期刊IEEE Sensors Journal
11
發行號12
DOIs
出版狀態Published - 2011

All Science Journal Classification (ASJC) codes

  • 儀器
  • 電氣與電子工程

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