Large-Scale Nanofabrication of Designed Nanostructures Using Angled Nanospherical-Lens Lithography for Surface Enhanced Infrared Absorption Spectroscopy

Yi Hsin Chien, Chang Han Wang, Chi Ching Liu, Shih Hui Chang, Kien Voon Kong, Yun Chorng Chang

研究成果: Article同行評審

11 引文 斯高帕斯(Scopus)

摘要

Nanophotonics has been a focused research discipline for the past decade and has resulted in many novel concepts that promise to change human life. However, the actual penetration of this research into real products is severely limited mostly due to the slow development of economic nanofabrication. In this study, we have demonstrated a versatile and low-cost nanofabrication method referred to as "angled nanospherical-lens lithography (A-NLL)", which is able to produce large-scale and periodic nanopatterns. The nanopatterns designed within a two-dimensional polar chart can be carefully fabricated on the substrate. The fabricated patterns easily cover an area larger than 1 cm2, which is beneficial as platforms for surface enhanced infrared absorption (SEIRA) where an expensive and bulky IR microscope is not required. We believe that the proposed A-NLL method is ideal for industrialization of future nanophotonic applications.

原文English
頁(從 - 到)24917-24925
頁數9
期刊ACS Applied Materials and Interfaces
9
發行號29
DOIs
出版狀態Published - 2017 七月 26

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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