TY - GEN
T1 - Larger surface profile measurement of microstructures by white-light phase-shifting interferometry and image stitching
AU - Chen, T. Y.
AU - Yeh, L. C.
PY - 2009
Y1 - 2009
N2 - White-light interferometry is very useful for highly resolved 3-D measurements of microscopic structures and micro devices. In this paper, a new stitching approach is developed to extend the measurement area. The characteristics of two neighboring images are enhanced by Laplacian filtering to reduce the effect of non-uniform illumination, and a proper sub-image is chosen based on the standard deviation of the sub-image for image correlation and stitching. Test of the method on the microstructure of a LCD panel shows that good stitching can be achieved within 1 pixel if the standard deviation of the comparing sub-image exceeds 7.1.
AB - White-light interferometry is very useful for highly resolved 3-D measurements of microscopic structures and micro devices. In this paper, a new stitching approach is developed to extend the measurement area. The characteristics of two neighboring images are enhanced by Laplacian filtering to reduce the effect of non-uniform illumination, and a proper sub-image is chosen based on the standard deviation of the sub-image for image correlation and stitching. Test of the method on the microstructure of a LCD panel shows that good stitching can be achieved within 1 pixel if the standard deviation of the comparing sub-image exceeds 7.1.
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M3 - Conference contribution
AN - SCOPUS:72849123464
SN - 9781615671892
SN - 9781615671892
T3 - Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
SP - 2382
EP - 2386
BT - Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
T2 - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
Y2 - 1 June 2009 through 4 June 2009
ER -