Laser-assisted and roller-based nano-imprinting technologies and their applications

Yung Chun Lee, Chun Hung Chen, Cheng Yu Chiu, Chun Shiang Chen

研究成果: Conference contribution

摘要

Nano-imprinting lithography (NIL) has been developed over 15 years and has shown its great potentials for nanopatterning and nano-fabrication. In this paper, new ideas on improving current nano-imprinting methods have been proposed and preliminary experimental tests are carried out. These proposed nano-imprinting methods are all based on the utilization of pulsed laser sources, either in UV or IR region, and can be easily implemented into a roller-based configuration, which is more effective and much faster than conventional planar type nano-imprinting methods. First of all, based on the Laser Assisted Direct Imprinting (LADI) method proposed in 2002, a modified roller-based LADI method is developed by applying a cylindrical quartz roller for mechanically loading as well as for optically focusing of a deep UV laser beam into a line. This modification not only fulfills a continuous type of LADI process but also more efficiently utilizes the laser energy so that large-area LADI is possible. Experimental testing demonstrates an imprinting rate of 3-10 cm2/min. Secondly, a new nano-imprinting lithography based on pulsed infrared laser heating is proposed and demonstrated. It utilizes the partial transparency of silicon crystals at IR spectrum to heat up the photo-resist layer. Possible improvements and applications on this IR-NIL will be addressed. Finally, a new method of direct contact printing and patterning of a thin metal film on silicon substrate based on the idea of nano-imprinting is presented. This method combines the effects of loaded contact pressure and IR pulsed laser heating at the metal-film/substrate interface to form a stronger bonding between them, and therefore complete the direct pattern transferring of metal film on substrate. Good experimental results are observed and possible applications will be discussed.

原文English
主出版物標題2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
頁面957-965
頁數9
DOIs
出版狀態Published - 2008 六月 13
事件19th Int. Conf. Design Theory and Methodology and 1st Int. Conf. Micro and Nano Systems, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007 - Las Vegas, NV, United States
持續時間: 2007 九月 42007 九月 7

出版系列

名字2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
3 PART B

Other

Other19th Int. Conf. Design Theory and Methodology and 1st Int. Conf. Micro and Nano Systems, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007
國家/地區United States
城市Las Vegas, NV
期間07-09-0407-09-07

All Science Journal Classification (ASJC) codes

  • 電腦繪圖與電腦輔助設計
  • 電腦科學應用
  • 機械工業
  • 建模與模擬

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