Laser assisted roller imprinting

Yung Chun Lee, Cheng Yu Chiu, Fei Bin Hsiao

研究成果: Conference contribution

摘要

This paper presents a new roller-based nanoimprinting method based on the laser assisted direct imprint (LADI) technique. Similar to LADI, it utilizes a high-energy pulse laser to melt the silicon substrate and a pre-loaded quartz mold to imprint nano-patterns into the substrate. However, a cylindrical roller made of highly transparent silica is introduced in this new method. Optically, the roller is acting like a cylindrical lens which can focus the laser beam into a line source at the mode/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. With this innovative roller design, the laser-assisted imprint process can be carried out in a smooth and continuous way and therefore open the possibility for large-area nanoimprinting and faster imprinting speed. A prototype setup of this laser-assisted roller imprinting (LARI) has been constructed and the experimental results are successfully obtained.

原文English
主出版物標題Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
頁面731-734
頁數4
DOIs
出版狀態Published - 2007 八月 28
事件2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
持續時間: 2007 一月 162007 一月 19

出版系列

名字Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
國家/地區Thailand
城市Bangkok
期間07-01-1607-01-19

All Science Journal Classification (ASJC) codes

  • 電腦網路與通信
  • 電腦科學應用
  • 電氣與電子工程

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