Laser assisted roller imprinting

Yung Chun Lee, Cheng Yu Chiu, Fei Bin Hsiao

研究成果: Conference contribution

摘要

This paper presents a new roller-based nanoimprinting method based on the laser assisted direct imprint (LADI) technique. Similar to LADI, it utilizes a high-energy pulse laser to melt the silicon substrate and a pre-loaded quartz mold to imprint nano-patterns into the substrate. However, a cylindrical roller made of highly transparent silica is introduced in this new method. Optically, the roller is acting like a cylindrical lens which can focus the laser beam into a line source at the mode/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. With this innovative roller design, the laser-assisted imprint process can be carried out in a smooth and continuous way and therefore open the possibility for large-area nanoimprinting and faster imprinting speed. A prototype setup of this laser-assisted roller imprinting (LARI) has been constructed and the experimental results are successfully obtained.

原文English
主出版物標題Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
頁面731-734
頁數4
DOIs
出版狀態Published - 2007 八月 28
事件2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
持續時間: 2007 一月 162007 一月 19

出版系列

名字Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
國家Thailand
城市Bangkok
期間07-01-1607-01-19

指紋

Lasers
Substrates
Laser modes
Laser beams
Light sources
Quartz
Laser pulses
Lenses
Silica
Silicon

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Computer Science Applications
  • Electrical and Electronic Engineering

引用此文

Lee, Y. C., Chiu, C. Y., & Hsiao, F. B. (2007). Laser assisted roller imprinting. 於 Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 (頁 731-734). [4160425] (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). https://doi.org/10.1109/NEMS.2007.352122
Lee, Yung Chun ; Chiu, Cheng Yu ; Hsiao, Fei Bin. / Laser assisted roller imprinting. Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. 頁 731-734 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).
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title = "Laser assisted roller imprinting",
abstract = "This paper presents a new roller-based nanoimprinting method based on the laser assisted direct imprint (LADI) technique. Similar to LADI, it utilizes a high-energy pulse laser to melt the silicon substrate and a pre-loaded quartz mold to imprint nano-patterns into the substrate. However, a cylindrical roller made of highly transparent silica is introduced in this new method. Optically, the roller is acting like a cylindrical lens which can focus the laser beam into a line source at the mode/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. With this innovative roller design, the laser-assisted imprint process can be carried out in a smooth and continuous way and therefore open the possibility for large-area nanoimprinting and faster imprinting speed. A prototype setup of this laser-assisted roller imprinting (LARI) has been constructed and the experimental results are successfully obtained.",
author = "Lee, {Yung Chun} and Chiu, {Cheng Yu} and Hsiao, {Fei Bin}",
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Lee, YC, Chiu, CY & Hsiao, FB 2007, Laser assisted roller imprinting. 於 Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007., 4160425, Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, 頁 731-734, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, Bangkok, Thailand, 07-01-16. https://doi.org/10.1109/NEMS.2007.352122

Laser assisted roller imprinting. / Lee, Yung Chun; Chiu, Cheng Yu; Hsiao, Fei Bin.

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 731-734 4160425 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

研究成果: Conference contribution

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N2 - This paper presents a new roller-based nanoimprinting method based on the laser assisted direct imprint (LADI) technique. Similar to LADI, it utilizes a high-energy pulse laser to melt the silicon substrate and a pre-loaded quartz mold to imprint nano-patterns into the substrate. However, a cylindrical roller made of highly transparent silica is introduced in this new method. Optically, the roller is acting like a cylindrical lens which can focus the laser beam into a line source at the mode/substrate interface. Mechanically, the roller provides a constant line-type contact pressure between the mold and substrate. With this innovative roller design, the laser-assisted imprint process can be carried out in a smooth and continuous way and therefore open the possibility for large-area nanoimprinting and faster imprinting speed. A prototype setup of this laser-assisted roller imprinting (LARI) has been constructed and the experimental results are successfully obtained.

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Lee YC, Chiu CY, Hsiao FB. Laser assisted roller imprinting. 於 Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 731-734. 4160425. (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). https://doi.org/10.1109/NEMS.2007.352122