Laterally grown ZnO nanowire ethanol gas sensors

Ting Jen Hsueh, Cheng Liang Hsu, Shoou Jinn Chang, I. Cherng Chen

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287 引文 斯高帕斯(Scopus)


We report the growth of ZnO nanowires on ZnO:Ga/glass templates and the fabrication of laterally grown ZnO nanowire ethanol sensors. It was found that growth direction of the nanowires depends strongly on growth parameters. It was also found that resistivity of the fabricated sensor decreased upon ethanol gas injection. By introducing 1500 ppm ethanol gas, it was found that the device response were around 20%, 35%, 58% and 61% when the gas sensor was operated at 180 °C, 230 °C, 260 °C and 300 °C, respectively. It was also found that the device response at 300 °C were around 18%, 26%, 43%, 55% and 61% when the concentration of injected ethanol gas was 50 ppm, 100 ppm, 500 ppm, 1000 ppm and 1500 ppm, respectively.

頁(從 - 到)473-477
期刊Sensors and Actuators, B: Chemical
出版狀態Published - 2007 十月 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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