Line-Focus Acoustic Microscopy Measurements of Nb2O5/MgO and BaTiO3/LaAlO3 Thin-Film/Substrate Configurations

Y. C. Lee; J. D. Achenbach; S. R. Gilbert; B. A. Block; B. W. Wessels; M. J. Nystrom

doi:10.1109/58.384445

Line-Focus Acoustic Microscopy Measurements of Nb2O5/MgO and BaTiO3/LaAlO3 Thin-Film/Substrate Configurations

Y. C. Lee
, J. D. Achenbach
, S. R. Gilbert
, B. A. Block
, B. W. Wessels
, M. J. Nystrom

機械工程學系

研究成果: Article › 同行評審

12 引文斯高帕斯（Scopus）

摘要

Line-focus acoustic microscopy has been used to measure the phase velocities of surface acoustic waves on bare MgO and bare LaAI03, and on Nb205/MgO and BaTi03/LaAI03 thin-film/substrate configurations. The thin films are polycrystalline materials. The substrates are anisotropic single-crystals. The measured angular variation of the surface acoustic wave velocities has been used to determine the elastic constants of MgO substrate and Nb205 thin-film. It has been assumed that the Nb205 films may be considered as essentially isotropic. The measurements for LaAI03 and BaTi03/LaAI03 show anomalies which are attributed to twinning in the LaAI03 substrate.

原文	English
頁（從 - 到）	376-380
頁數	5
期刊	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
卷	42
發行號	3
DOIs	https://doi.org/10.1109/58.384445
出版狀態	Published - 1995 5月

All Science Journal Classification (ASJC) codes

儀器
聲學與超音波
電氣與電子工程

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10.1109/58.384445

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title = "Line-Focus Acoustic Microscopy Measurements of Nb2O5/MgO and BaTiO3/LaAlO3 Thin-Film/Substrate Configurations",

abstract = "Line-focus acoustic microscopy has been used to measure the phase velocities of surface acoustic waves on bare MgO and bare LaAI03, and on Nb205/MgO and BaTi03/LaAI03 thin-film/substrate configurations. The thin films are polycrystalline materials. The substrates are anisotropic single-crystals. The measured angular variation of the surface acoustic wave velocities has been used to determine the elastic constants of MgO substrate and Nb205 thin-film. It has been assumed that the Nb205 films may be considered as essentially isotropic. The measurements for LaAI03 and BaTi03/LaAI03 show anomalies which are attributed to twinning in the LaAI03 substrate.",

author = "Lee, \{Y. C.\} and Achenbach, \{J. D.\} and Gilbert, \{S. R.\} and Block, \{B. A.\} and Wessels, \{B. W.\} and Nystrom, \{M. J.\}",

note = "Funding Information: Manuscript received May 26, 1994; revised October 3, 1994; accepted October 5, 1994. This work was sponsored by the Department of Energy under Contract No. DE-FG02-86ER13484 and DE-FG02-85ER45209. Y.-C. Lee and J. D. Achenbach are with the Center for Quality Engineering and Failure Prevention, Northwestern University, Evanston, IL 60208 USA. N. J. Nystrom, S. R. Gilbert, B. A. Block, and B. W. Wessels are with the Department of Materials Science and Engineering, Northwestern University Evanston, IL 60208 USA. IEEE Log Number 9409924.",

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pages = "376--380",

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AU - Lee, Y. C.

AU - Achenbach, J. D.

AU - Gilbert, S. R.

AU - Block, B. A.

AU - Wessels, B. W.

AU - Nystrom, M. J.

N1 - Funding Information: Manuscript received May 26, 1994; revised October 3, 1994; accepted October 5, 1994. This work was sponsored by the Department of Energy under Contract No. DE-FG02-86ER13484 and DE-FG02-85ER45209. Y.-C. Lee and J. D. Achenbach are with the Center for Quality Engineering and Failure Prevention, Northwestern University, Evanston, IL 60208 USA. N. J. Nystrom, S. R. Gilbert, B. A. Block, and B. W. Wessels are with the Department of Materials Science and Engineering, Northwestern University Evanston, IL 60208 USA. IEEE Log Number 9409924.

PY - 1995/5

Y1 - 1995/5

N2 - Line-focus acoustic microscopy has been used to measure the phase velocities of surface acoustic waves on bare MgO and bare LaAI03, and on Nb205/MgO and BaTi03/LaAI03 thin-film/substrate configurations. The thin films are polycrystalline materials. The substrates are anisotropic single-crystals. The measured angular variation of the surface acoustic wave velocities has been used to determine the elastic constants of MgO substrate and Nb205 thin-film. It has been assumed that the Nb205 films may be considered as essentially isotropic. The measurements for LaAI03 and BaTi03/LaAI03 show anomalies which are attributed to twinning in the LaAI03 substrate.

AB - Line-focus acoustic microscopy has been used to measure the phase velocities of surface acoustic waves on bare MgO and bare LaAI03, and on Nb205/MgO and BaTi03/LaAI03 thin-film/substrate configurations. The thin films are polycrystalline materials. The substrates are anisotropic single-crystals. The measured angular variation of the surface acoustic wave velocities has been used to determine the elastic constants of MgO substrate and Nb205 thin-film. It has been assumed that the Nb205 films may be considered as essentially isotropic. The measurements for LaAI03 and BaTi03/LaAI03 show anomalies which are attributed to twinning in the LaAI03 substrate.

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Line-Focus Acoustic Microscopy Measurements of Nb2O5/MgO and BaTiO3/LaAlO3 Thin-Film/Substrate Configurations

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