Linewidth roughness in nanowire-mask-based graphene nanoribbons

Guangyu Xu, Carlos M. Torres, Jingwei Bai, Jianshi Tang, Tao Yu, Yu Huang, Xiangfeng Duan, Yuegang Zhang, Kang L. Wang

研究成果: Article同行評審

12 引文 斯高帕斯(Scopus)

摘要

We present the analysis of linewidth roughness (LWR) in nanowire-mask-based graphene nanoribbons (GNRs) and evaluate its impact on the device performance. The data show that the LWR amplitude decreases with the GNR width, possibly due to the etching undercut near the edge of a nanowire-mask. We further discuss the large variation in GNR devices in the presence of LWR by analyzing the measured transport properties and on/off ratios.

原文English
文章編號243118
期刊Applied Physics Letters
98
發行號24
DOIs
出版狀態Published - 2011 六月 13

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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