Lithium cobalt oxide cathode film prepared by rf sputtering

Engineering & Materials Science

• Sputtering 87%
• Cobalt 79%
• Lithium 76%
• Cathodes 68%
• Oxides 58%
• Crystallization 24%
• Annealing 22%
• Thin films 21%
• Magnetron sputtering 15%
• Oxidation-Reduction 15%
• Temperature 13%
• Partial pressure 13%
• Flow of gases 11%
• Heat treatment 9%
• Silicon 9%
• Flow rate 8%

Physics & Astronomy

• lithium oxides 100%
• cobalt oxides 92%
• cathodes 55%
• sputtering 53%
• crystallization 17%
• nanostructure (characteristics) 14%
• annealing 13%
• thin films 11%
• partial pressure 11%
• gas flow 10%
• radio frequencies 9%
• magnetron sputtering 9%
• heat treatment 9%
• flow velocity 9%
• grain size 8%
• oxygen 6%
• temperature 6%
• silicon 6%

Chemical Compounds

• Sputtering 74%
• Cathode 50%
• Oxide 37%
• Liquid Film 33%
• Annealing 15%
• Crystallization 13%
• Magnetron Sputtering 11%
• Partial Pressure 9%
• Grain Size 9%
• Heat Treatment 8%
• Flow Kinetics 7%
• Pressure 5%