Long-period waveguide gratings with amorphous silicon cladding layer on silicon-on-insulator substrates realized by anisotropic wet etching

Wen-Kuei Chuang, Mao Teng Hsu, Guo Shian Wang

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)

指紋

深入研究「Long-period waveguide gratings with amorphous silicon cladding layer on silicon-on-insulator substrates realized by anisotropic wet etching」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Physics & Astronomy