TY - GEN
T1 - Low-stress transfer of graphene and its tuneable resistance by remote plasma treatments in hydrogen
AU - Chen, Waileong
AU - Tu, Chia Hao
AU - Liang, Keng Chih
AU - Liu, Chih Yi
AU - Liu, Chuan Pu
AU - Tzeng, Yonhua
PY - 2011
Y1 - 2011
N2 - A novel low-stress process for transferring thermal CVD single-layer graphene from copper foils to destination substrates is demonstrated. Electrical and optical characteristics of as-transferred graphene and the hydrogen remote-plasma modified graphene are presented. Although graphene is mechanically very strong considering its atomically thin structure, large-area single-layer graphene is practically very fragile especially during handling and transfer from one substrate to another. Handling of large-area free-standing graphene is even more challenging. Combination of effective transfer and surface treatment of graphene by hydrogenation allows fine tuning of its electrical resistivity for practical applications.
AB - A novel low-stress process for transferring thermal CVD single-layer graphene from copper foils to destination substrates is demonstrated. Electrical and optical characteristics of as-transferred graphene and the hydrogen remote-plasma modified graphene are presented. Although graphene is mechanically very strong considering its atomically thin structure, large-area single-layer graphene is practically very fragile especially during handling and transfer from one substrate to another. Handling of large-area free-standing graphene is even more challenging. Combination of effective transfer and surface treatment of graphene by hydrogenation allows fine tuning of its electrical resistivity for practical applications.
UR - http://www.scopus.com/inward/record.url?scp=84858994478&partnerID=8YFLogxK
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U2 - 10.1109/NANO.2011.6144398
DO - 10.1109/NANO.2011.6144398
M3 - Conference contribution
AN - SCOPUS:84858994478
SN - 9781457715143
T3 - Proceedings of the IEEE Conference on Nanotechnology
SP - 1093
EP - 1096
BT - 2011 11th IEEE International Conference on Nanotechnology, NANO 2011
T2 - 2011 11th IEEE International Conference on Nanotechnology, NANO 2011
Y2 - 15 August 2011 through 19 August 2011
ER -