Low subthreshold swing InGaZnO thin film transistors with UV-ozone-treated BaTiO3 dielectric layers

Huei Yu Liou, An Hsiu Cheng, Sheng-Yuan Chu

研究成果: Conference contribution

摘要

We developed a method to improve the electrical performance of amorphous BaTiO3 thin film by UV-ozone treatment. The treatment promoted densification of the dielectric layer by decreasing oxygen-vacancy and increasing metal-oxide bonds. The InGaZnO-TFTs exhibited high on/off ratio of 1.46 × 107 and the low sub-threshold swing of 0.069 V/dec.

原文English
主出版物標題23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016
發行者Society for Information Display
頁面134-137
頁數4
1
ISBN(電子)9781510845510
出版狀態Published - 2016 一月 1
事件23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016 - Fukuoka, Japan
持續時間: 2016 十二月 72016 十二月 9

Other

Other23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016
國家Japan
城市Fukuoka
期間16-12-0716-12-09

指紋

Ozone
Amorphous films
Oxygen vacancies
Thin film transistors
Densification
Oxides
Metals
Thin films

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Human-Computer Interaction
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

引用此文

Liou, H. Y., Cheng, A. H., & Chu, S-Y. (2016). Low subthreshold swing InGaZnO thin film transistors with UV-ozone-treated BaTiO3 dielectric layers. 於 23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016 (卷 1, 頁 134-137). Society for Information Display.
Liou, Huei Yu ; Cheng, An Hsiu ; Chu, Sheng-Yuan. / Low subthreshold swing InGaZnO thin film transistors with UV-ozone-treated BaTiO3 dielectric layers. 23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016. 卷 1 Society for Information Display, 2016. 頁 134-137
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Liou, HY, Cheng, AH & Chu, S-Y 2016, Low subthreshold swing InGaZnO thin film transistors with UV-ozone-treated BaTiO3 dielectric layers. 於 23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016. 卷 1, Society for Information Display, 頁 134-137, 23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016, Fukuoka, Japan, 16-12-07.

Low subthreshold swing InGaZnO thin film transistors with UV-ozone-treated BaTiO3 dielectric layers. / Liou, Huei Yu; Cheng, An Hsiu; Chu, Sheng-Yuan.

23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016. 卷 1 Society for Information Display, 2016. p. 134-137.

研究成果: Conference contribution

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Liou HY, Cheng AH, Chu S-Y. Low subthreshold swing InGaZnO thin film transistors with UV-ozone-treated BaTiO3 dielectric layers. 於 23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016. 卷 1. Society for Information Display. 2016. p. 134-137