@inproceedings{d16b0e5f97a34b13b1d1f984d26fe02c,
title = "Low temperature a-sige: H near-IR sensor and photovoltaic devices for flexible multi-functional panel",
abstract = "High Near-IR response photo-diode (0.1A/W@800nm) and high efficiency a- Si/a-SiGe tandem solar cell (8.38%) were demonstrated using high-density plasmafabricated a-SiGe:H deposition technology with Si2H6 and GeH4 precursor. The low temperature (140oC) a-SiGe:H films with low defect density (2.3x1016cm-3)are suitable for the applications of flexible solar self-powered multi-functional panel and 3D stacked monolithic devices.",
author = "Kao, {Ming Hsuan} and Shieh, {Jia Min} and Shen, {Chang Hong} and Peichen Yu and Kuo, {Hao Chung} and Lee, {Ching Ting} and Yang, {Fu Liang}",
year = "2013",
language = "English",
isbn = "9781557529725",
series = "CLEO: Applications and Technology, CLEO_AT 2013",
pages = "ATh4N.3",
booktitle = "Conference on Lasers and Electro Optics, CLEO",
note = "CLEO: Applications and Technology, CLEO_AT 2013 ; Conference date: 09-06-2013 Through 14-06-2013",
}
