@inproceedings{618bb0cd96d44e1fb02d8648f45ee5b9,
title = "Low temperature a-SiGe:H Near-IR sensor and photovoltaic devices for flexible multi-functional panel",
abstract = "High Near-IR response photo-diode (0.1A/W@800nm) and high efficiency a-Si/a-SiGe tandem solar cell (8.38%) were demonstrated using high-density plasmafabricated a-SiGe:H deposition technology with Si2H6 and GeH4 precursor. The low temperature (140°C) a-SiGe:H films with low defect density (2.3×1016cm -3)are suitable for the applications of flexible solar self-powered multi-functional panel and 3D stacked monolithic devices.",
author = "Kao, {Ming Hsuan} and Shieh, {Jia Min} and Shen, {Chang Hong} and Peichen Yu and Kuo, {Hao Chung} and Lee, {Ching Ting} and Yang, {Fu Liang}",
year = "2013",
doi = "10.1364/cleo_at.2013.ath4n.3",
language = "English",
isbn = "9781557529725",
series = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
publisher = "IEEE Computer Society",
booktitle = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
address = "United States",
note = "2013 Conference on Lasers and Electro-Optics, CLEO 2013 ; Conference date: 09-06-2013 Through 14-06-2013",
}