TY - JOUR
T1 - Low-temperature CVD carbon coatings on glass plates for flat panel display applications
AU - Tzeng, Y.
AU - Liu, C.
AU - Cutshaw, C.
AU - Chen, Z.
N1 - Funding Information:
The authors wish to acknowledge the support from the Office of Naval Research, the NASA, the Alabama Microelectronics Science and Technology Center, and Auburn University Space Power Institute.
PY - 2000
Y1 - 2000
N2 - Low-temperature chemical vapour deposition processes were studied for coating carbon films on metal-coated glass plates. Thermal CVD in hydrocarbon mixtures was used for carbon deposition at temperatures between 300°C and 550°C. Carbon deposited on metal coated glass plates were examined by SEM and analyzed using a pin to disk setup in an ultra high vacuum chamber for measuring the electron emission characteristics. Using a one-millimeter diameter tungsten rod with a hemispherical tip as the anode while the carbon coatings as the cathode, current-voltage characteristics of the carbon coatings were measured and used for calculating the electric field at which electron emission started as well as calculating the field enhancement factor of the carbon coatings. Field emission of electrons from carbon coatings starting from an electric field as low as 1.4 volts per micrometer has been achieved.
AB - Low-temperature chemical vapour deposition processes were studied for coating carbon films on metal-coated glass plates. Thermal CVD in hydrocarbon mixtures was used for carbon deposition at temperatures between 300°C and 550°C. Carbon deposited on metal coated glass plates were examined by SEM and analyzed using a pin to disk setup in an ultra high vacuum chamber for measuring the electron emission characteristics. Using a one-millimeter diameter tungsten rod with a hemispherical tip as the anode while the carbon coatings as the cathode, current-voltage characteristics of the carbon coatings were measured and used for calculating the electric field at which electron emission started as well as calculating the field enhancement factor of the carbon coatings. Field emission of electrons from carbon coatings starting from an electric field as low as 1.4 volts per micrometer has been achieved.
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U2 - 10.1557/proc-621-q2.2.1
DO - 10.1557/proc-621-q2.2.1
M3 - Conference article
AN - SCOPUS:0034431059
SN - 0272-9172
VL - 621
SP - Q221-Q225
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
T2 - Electron-Emissive Materials, Vacuum Microelectronics and Flat-Panel Displays
Y2 - 25 April 2000 through 27 April 2000
ER -