Low temperature deposition of diamond using chloromethane in a hot-filament chemical vapor deposition reactor

Franklin Chau Nan Hong, Jing Chuang Hsieh, Jih Jen Wu, Gou Tsau Liang, Jen Haw Hwang

研究成果: Conference article › 同行評審

35 引文 斯高帕斯（Scopus）

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Chemical Compounds

Engineering & Materials Science