Low-temperature growth of Si-nanostructures by laser assistance of conventional plasma enhanced chemical vapor deposition

Chun Hung Lin, Ching Ting Lee

研究成果: Conference contribution

摘要

We utilize a CO2 laser in the deposition process because SiH4 molecules have high photon absorption of laser light. This absorption increases the decomposition of SiH4 molecules and helps form the Si-nanostructures in low-temperature growth.

原文English
主出版物標題CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
主出版物子標題Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
頁數1
ISBN(電子)0780377664
DOIs
出版狀態Published - 2003 一月 1
事件5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan
持續時間: 2003 十二月 152003 十二月 19

出版系列

名字Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
2

Other

Other5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
國家/地區Taiwan
城市Taipei
期間03-12-1503-12-19

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 凝聚態物理學
  • 電氣與電子工程

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