Low threshold voltage and high drive current poly-silicon thin film transistors using ytterbium metal gate and LaALO3 dielectric

B. F. Hung, C. H. Wu, Albert Chin, S. J. Wang, J. W. Lin, I. J. Hsieh

研究成果: Conference contribution

摘要

We have demonstrated high-performance metal-gate/high-κ Ytterbium/LaAlO3 low-temperature poly-Si (LTPS) thin film transistors (TFTs) that have both high drive current capability and high voltage operation. The high drive current is due to the combined effect of low work-function Ytterbium metal gate and high gate capacitance by high-κ LaAlO3 dielectric. The high breakdown voltage is also due to the high-κ LaAlO3 dielectric to give larger physical thickness at the same equivalent oxide thickness (EOT). The good reliability and full process compatibility are the other important merits for Ytterbium/LaAlO3 device.

原文English
主出版物標題AD'07 - Proceedings of Asia Display 2007
頁面1190-1193
頁數4
出版狀態Published - 2007
事件Asia Display 2007, AD'07 - Shanghai, China
持續時間: 2007 3月 122007 3月 16

出版系列

名字AD'07 - Proceedings of Asia Display 2007
2

Other

OtherAsia Display 2007, AD'07
國家/地區China
城市Shanghai
期間07-03-1207-03-16

All Science Journal Classification (ASJC) codes

  • 硬體和架構
  • 電氣與電子工程

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