Magnesium zirconate titanate thin films used as an no2 sensing layer for gas sensor applications developed using a sol–gel method

Pei Shan Huang, Ke Jing Lee, Yeong Her Wang

研究成果: Article同行評審

摘要

Magnesium zirconate titanate (MZT) thin films, used as a sensing layer on Al interdigitated electrodes prepared using a sol–gel spin-coating method, are demonstrated in this study. The p-type MZT/Al/SiO2 /Si structure for sensing NO2 is also discussed. The results indicated that the best sensitivity of the gas sensor occurred when it was operating at a temperature ranging from 100 to 150 C. The detection limit of the sensor was as low as 250 ppb. The sensitivity of the MZT thin film was 8.64% and 34.22% for 0.25 ppm and 5 ppm of NO2 gas molecules at a working temperature of 150 C, respectively. The gas sensor also exhibited high repeatability and selectivity for NO2. The response values to 250, 500, 1000, 1500, 2000, 2500, and 5000 ppb NO2 at 150 C were 8.64, 9.52, 12, 16.63, 20.3, 23, and 34.22%, respectively. Additionally, we observed a high sensing linearity in NO2 gas molecules. These results indicate that MZT-based materials have potential applications for use as gas sensors.

原文English
文章編號2825
期刊Sensors
21
發行號8
DOIs
出版狀態Published - 2021 四月 2

All Science Journal Classification (ASJC) codes

  • 分析化學
  • 資訊系統
  • 原子與分子物理與光學
  • 生物化學
  • 儀器
  • 電氣與電子工程

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