Magnetron sputtering of tantalum oxide thin electrolyte film for electrochromic applications

Chien Cheng Liu, Kuang I. Liu, Hao Tung Lin, Jow Lay Huang

研究成果: Conference contribution

摘要

Electrochromism have been widely investigated due to their potential applications such as automobile and building window. In this study, tantalum oxide thin films used as ion conducting layer were deposited on WO 3/ITO at room temperature by magnetron sputtering. The thickness of tantalum oxide films were varied to investigate their effects on composition, microstructure, optical properties, and electrochromic properties determined by X-ray diffraction, UV-visible spectrometer, Atomic force microscope (AFM), and field-emission scanning electron microscope (FE-SEM), respectively. Experimental results indicated Ta2O5 thin film with the thickness of 300 nm showed better electrochromic property.

原文English
主出版物標題High-Performance Ceramics VII
發行者Trans Tech Publications Ltd
頁面1604-1608
頁數5
ISBN(列印)9783037854259
DOIs
出版狀態Published - 2012 一月 1
事件7th China International Conference on High-Performance Ceramics, CICC-7 - Xiamen, China
持續時間: 2011 十一月 42011 十一月 7

出版系列

名字Key Engineering Materials
512-515
ISSN(列印)1013-9826
ISSN(電子)1662-9795

Other

Other7th China International Conference on High-Performance Ceramics, CICC-7
國家China
城市Xiamen
期間11-11-0411-11-07

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • 引用此

    Liu, C. C., Liu, K. I., Lin, H. T., & Huang, J. L. (2012). Magnetron sputtering of tantalum oxide thin electrolyte film for electrochromic applications. 於 High-Performance Ceramics VII (頁 1604-1608). (Key Engineering Materials; 卷 512-515). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.512-515.1604