Manipulation of the crystallinity boundary of pulsed laser deposited high-k HfO2-TiO2-Y2O3 combinatorial thin films

J. L. Klamo, P. K. Schenck, P. G. Burke, K. S. Chang, M. L. Green

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

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深入研究「Manipulation of the crystallinity boundary of pulsed laser deposited high-k HfO<sub>2</sub>-TiO<sub>2</sub>-Y<sub>2</sub>O<sub>3</sub> combinatorial thin films」主題。共同形成了獨特的指紋。

Physics & Astronomy