Manufacturability of multivariate applications in the semiconductor industry

Chang Yung Cheng Jonathan, Fan Tien Cheng

研究成果: Conference contribution

4 引文 斯高帕斯(Scopus)

摘要

When advanced automation technologies are applied in the semiconductor industry, advanced equipment control has become increasingly feasible; hence it is now easier to improve overall manufacturing performance, including cycle time, productivity, and product quality. Currently, Fault Detection and Classification (FDC) is a newly deployed system that supports tool control in the semiconductor industry. Based on comprehensive and real time tool sensor data of an FDC infrastructure, numerous novel multivariate applications have been developed to further enhance tool and manufacturing productivity. However, when most multivariate applications were designed and pilot run in production environment, they all encountered a similar challenge - manufacturability. Because of insufficiency of manufacturing know-how and manufacturability, most multivariate applications cannot be widely deployed to an entire FAB for all types of tools and processes. This work investigates various multivariate applications and presents a novel methodology for improving manufacturability design of multivariate applications in the semiconductor industry.

原文English
主出版物標題2006 IEEE International Conference on Automation Science and Engineering, CASE
發行者Institute of Electrical and Electronics Engineers Inc.
頁面230-235
頁數6
ISBN(列印)1424403103, 9781424403103
DOIs
出版狀態Published - 2006 一月 1
事件2006 IEEE International Conference on Automation Science and Engineering, CASE - Shanghai, China
持續時間: 2006 十月 82006 十月 10

出版系列

名字2006 IEEE International Conference on Automation Science and Engineering, CASE

Other

Other2006 IEEE International Conference on Automation Science and Engineering, CASE
國家/地區China
城市Shanghai
期間06-10-0806-10-10

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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