摘要
| 原文 | English |
|---|---|
| 專利號 | 8983644 |
| 出版狀態 | Published - 2011 十月 13 |
指紋
引用此文
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TY - PAT
T1 - Manufacturing execution system with virtual-metrology capabilities and manufacturing system including the same
AU - Cheng, Fan-Tien
PY - 2011/10/13
Y1 - 2011/10/13
N2 - A manufacturing execution system (MES) with virtual-metrology capabilities and a manufacturing system including the MES are provided. The MES is built on a middleware architecture (such as an object request broker architecture), and includes an equipment manager, a virtual metrology system (VMS), a statistical process control (SPC) system, an alarm manager and a scheduler. The manufacturing system includes a first process tool, a second process tool, a metrology tool, the aforementioned MES, a first R2R (Run-to-Run) controller and a second R2R controller.
AB - A manufacturing execution system (MES) with virtual-metrology capabilities and a manufacturing system including the MES are provided. The MES is built on a middleware architecture (such as an object request broker architecture), and includes an equipment manager, a virtual metrology system (VMS), a statistical process control (SPC) system, an alarm manager and a scheduler. The manufacturing system includes a first process tool, a second process tool, a metrology tool, the aforementioned MES, a first R2R (Run-to-Run) controller and a second R2R controller.
M3 - Patent
M1 - 8983644
ER -