摘要
A manufacturing execution system (MES) with virtual-metrology capabilities and a manufacturing system including the MES are provided. The MES is built on a middleware architecture (such as an object request broker architecture), and includes an equipment manager, a virtual metrology system (VMS), a statistical process control (SPC) system, an alarm manager and a scheduler. The manufacturing system includes a first process tool, a second process tool, a metrology tool, the aforementioned MES, a first R2R (Run-to-Run) controller and a second R2R controller.
| 貢獻的翻譯標題 | 具有虛擬量測功能的製造執行系統與製造系統 |
|---|---|
| 原文 | English |
| 專利號 | 8983644 |
| 出版狀態 | Published - 2011 十月 13 |