Mask-free regrowth of GaN p-i-n structure on selective-area Si-implanted n-GaN template layer

Jinn Kong Sheu, Po Cheng Chen, Yu Hsiang Yeh, Shih Hsun Kuo, Ming Lun Lee, Po Hsun Liao, Wei Chih Lai

研究成果: Article

2 引文 (Scopus)

摘要

GaN p-i-n homoepitaxial structures are in-situ formed through mask-free selective-area growth (SAG) on Si-implanted GaN (SIG) templates. Selective-area Si implantation on GaN layer creates damaged surface regions that lead to lattice distortion from the neighboring implantation-free regions. GaN homoepitaxial regrowth occurs preferentially on the implantation-free regions when the SIG films serve as growth templates. The optical and electrical characteristics of the GaN p-i-n diodes formed by mask-free SAG are comparable to those of diodes fabricated by conventional technique. The GaN p-i-n photodiodes exhibit typical ultraviolet (UV)-to-visible (360/480 nm) spectral rejection ratios over three orders of magnitude. With forward injection currents of 10-100 mA, the proposed GaN diodes exhibit a UV emission at around 362 nm because of the band-edge transition between shallow donor states and the valence-band edge, rather than defect-related emission.

原文English
頁(從 - 到)17-25
頁數9
期刊Acta Materialia
108
DOIs
出版狀態Published - 2016 四月 15

指紋

Masks
Diodes
Electron transitions
Valence bands
Photodiodes
Defects

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Polymers and Plastics
  • Metals and Alloys

引用此文

Sheu, Jinn Kong ; Chen, Po Cheng ; Yeh, Yu Hsiang ; Kuo, Shih Hsun ; Lee, Ming Lun ; Liao, Po Hsun ; Lai, Wei Chih. / Mask-free regrowth of GaN p-i-n structure on selective-area Si-implanted n-GaN template layer. 於: Acta Materialia. 2016 ; 卷 108. 頁 17-25.
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Mask-free regrowth of GaN p-i-n structure on selective-area Si-implanted n-GaN template layer. / Sheu, Jinn Kong; Chen, Po Cheng; Yeh, Yu Hsiang; Kuo, Shih Hsun; Lee, Ming Lun; Liao, Po Hsun; Lai, Wei Chih.

於: Acta Materialia, 卷 108, 15.04.2016, p. 17-25.

研究成果: Article

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AU - Lee, Ming Lun

AU - Liao, Po Hsun

AU - Lai, Wei Chih

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