TY - GEN
T1 - Measurement of adhesive force between two mica surfaces with multiple beam interferometry
AU - Chen, Terry Yuan-Fang
AU - Jung, J. C.
PY - 2010/11/9
Y1 - 2010/11/9
N2 - Surface forces play a crucial role in the contact behavior of micro-components as well as the application of MEMS products. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the adhesive force between two mica thin films. The contact area on the mica can be determined from the FECO fringes. A double cantilever spring is used to measure the adhesive (pull-off) forces between the two mica thin films. The usefulness of the adhesive force measurement system is validated by comparing with the result from JKR contact theory.
AB - Surface forces play a crucial role in the contact behavior of micro-components as well as the application of MEMS products. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the adhesive force between two mica thin films. The contact area on the mica can be determined from the FECO fringes. A double cantilever spring is used to measure the adhesive (pull-off) forces between the two mica thin films. The usefulness of the adhesive force measurement system is validated by comparing with the result from JKR contact theory.
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M3 - Conference contribution
AN - SCOPUS:78049451841
SN - 9781617386909
T3 - Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2010
SP - 1685
EP - 1689
BT - Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2010
T2 - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2010
Y2 - 7 June 2010 through 10 June 2010
ER -