TY - GEN
T1 - Measurement of adhesive force between two mica surfaces with multiple beam interferometry
AU - Chen, T. Y.
AU - Jung, J. C.
PY - 2011
Y1 - 2011
N2 - Surface forces play a crucial role in the contact behavior of micro-components as well as the application of MEMS products. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the adhesive force between two mica thin films. The contact area on the mica can be determined from the FECO fringes. A double cantilever spring is used to measure the adhesive (pull-off) forces between the two mica thin films. The usefulness of the adhesive force measurement system is validated by comparing with the result from JKR contact theory.
AB - Surface forces play a crucial role in the contact behavior of micro-components as well as the application of MEMS products. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the adhesive force between two mica thin films. The contact area on the mica can be determined from the FECO fringes. A double cantilever spring is used to measure the adhesive (pull-off) forces between the two mica thin films. The usefulness of the adhesive force measurement system is validated by comparing with the result from JKR contact theory.
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U2 - 10.1007/978-1-4419-8825-6_28
DO - 10.1007/978-1-4419-8825-6_28
M3 - Conference contribution
AN - SCOPUS:79960326644
SN - 9781441988249
T3 - Conference Proceedings of the Society for Experimental Mechanics Series
SP - 197
EP - 201
BT - MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics
PB - Springer New York LLC
ER -