Measurement of DNA hybridization by nano-deformation of microcantilever in CMOS biosensor

S. M. Yang, T. I. Yin, C. Chang

研究成果: Conference contribution

摘要

A 1 cm × 1 cm biosensor chip for analyzing DNA hybridization is developed by CMOS process. The sensor chip has 6 measurement regions, each region with 3 pairs of parallel microcantilever of 125 × 60 × 0.75μm. The microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure the nano-deformation induced by the surface-assemble monolayer of alkanethiols on Au. By the Langmuir adsorption model, the estimated adsorption rate of the ssDNA is 0.005sec'1. The design has intrinsic sensitivity needed in biochemical applications such as detecting nucleotide polymorphism and single base mutation to sequence DNA. The capability of in-situ, multipoint measurement promise many frontiers to be explored.

原文English
主出版物標題Proceedings of the ASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008
頁面217-221
頁數5
DOIs
出版狀態Published - 2008
事件ASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008 - Sharm El Sheikh, Egypt
持續時間: 2008 一月 112008 一月 13

出版系列

名字Proceedings of the ASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008

Other

OtherASME 2nd Multifunctional Nanocomposites and Nanomaterials Conference, MN2008
國家/地區Egypt
城市Sharm El Sheikh
期間08-01-1108-01-13

All Science Journal Classification (ASJC) codes

  • 電氣與電子工程
  • 機械工業
  • 凝聚態物理學

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