TY - JOUR
T1 - Measurement of friction force between two mica surfaces with multiple beam interferometry
AU - Jung, J. C.
AU - Chen, T.
N1 - Publisher Copyright:
© 2010 Owned by the authors, published by EDP Sciences.
PY - 2010/6/9
Y1 - 2010/6/9
N2 - Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.
AB - Friction forces play a crucial role in the tribological behaviour of microcomponents and the application of MEMS products. It is necessary to develop a measurement system to understand and control the material characteristics. In this study, a microscopic measurement system based on multiple beam interferometry is developed to measure the friction force between two mica thin films. Some frictional behaviour between the two mica sheets in contact are reported. The evaluated shear strength of mica agrees well to the existing data. It is possible to use the developed system for micro-tribology study.
UR - http://www.scopus.com/inward/record.url?scp=84921342358&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84921342358&partnerID=8YFLogxK
U2 - 10.1051/epjconf/20100606002
DO - 10.1051/epjconf/20100606002
M3 - Conference article
AN - SCOPUS:84921342358
SN - 2101-6275
VL - 6
JO - EPJ Web of Conferences
JF - EPJ Web of Conferences
M1 - 06002
T2 - 14th International Conference on Experimental Mechanics, ICEM 2014
Y2 - 4 July 2010 through 9 July 2010
ER -