TY - JOUR
T1 - Mechanical and Tribological Properties of NbTiAlx, NbTiAl0.5Ny, and NbTiAl0.5N14-CHz Coatings with Various Aluminum Target Currents and Nitrogen and Acetylene Flow Rates
AU - Su, Y. L.
AU - Kao, W. H.
AU - Chen, B. Y.
N1 - Funding Information:
The authors gratefully acknowledge the financial support provided to this study by the Ministry of Science and Technology of Taiwan under Contract No. MOST 110-2221-E-006-161. The authors also appreciate the access granted to EM000600 and EM000700 of MOST-110-2731-M-006-001 by the Core Facility Center of National Cheng Kung University.
Publisher Copyright:
© 2022, ASM International.
PY - 2022
Y1 - 2022
N2 - NbTiAlX, NbTiAl0.5Ny, and NbTiAl0.5N14-CHz coatings were deposited on SKH51 substrates using a radio frequency unbalanced magnetron sputtering system. The NbTiAl0.5Ny coatings prepared with higher nitrogen fluxes (14 sccm) exhibited a denser cross-sectional structure, a higher hardness, a better adhesion, and a lower wear rate than the NbTiAlx coatings. The friction coefficients of the NbTiAl0.5N14-CHz coatings were lower than those of the NbTiAl0.5Ny coatings. Furthermore, the NbTiAl0.5N14-CH12 coating (acetylene flux 12 sccm) had a DLC structure with enhanced adhesion properties and formed a carbon-rich transfer layer on the counterbody surface during sliding. The NbTiAl0.5N14-CH12 coating thus exhibited the best tribological properties among all the coatings.
AB - NbTiAlX, NbTiAl0.5Ny, and NbTiAl0.5N14-CHz coatings were deposited on SKH51 substrates using a radio frequency unbalanced magnetron sputtering system. The NbTiAl0.5Ny coatings prepared with higher nitrogen fluxes (14 sccm) exhibited a denser cross-sectional structure, a higher hardness, a better adhesion, and a lower wear rate than the NbTiAlx coatings. The friction coefficients of the NbTiAl0.5N14-CHz coatings were lower than those of the NbTiAl0.5Ny coatings. Furthermore, the NbTiAl0.5N14-CH12 coating (acetylene flux 12 sccm) had a DLC structure with enhanced adhesion properties and formed a carbon-rich transfer layer on the counterbody surface during sliding. The NbTiAl0.5N14-CH12 coating thus exhibited the best tribological properties among all the coatings.
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U2 - 10.1007/s11665-022-07681-9
DO - 10.1007/s11665-022-07681-9
M3 - Article
AN - SCOPUS:85142788836
SN - 1059-9495
JO - Journal of Materials Engineering and Performance
JF - Journal of Materials Engineering and Performance
ER -