Mechanical and Tribological Properties of NbTiAlx, NbTiAl0.5Ny, and NbTiAl0.5N14-CHz Coatings with Various Aluminum Target Currents and Nitrogen and Acetylene Flow Rates

Y. L. Su, W. H. Kao, B. Y. Chen

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

摘要

NbTiAlX, NbTiAl0.5Ny, and NbTiAl0.5N14-CHz coatings were deposited on SKH51 substrates using a radio frequency unbalanced magnetron sputtering system. The NbTiAl0.5Ny coatings prepared with higher nitrogen fluxes (14 sccm) exhibited a denser cross-sectional structure, a higher hardness, a better adhesion, and a lower wear rate than the NbTiAlx coatings. The friction coefficients of the NbTiAl0.5N14-CHz coatings were lower than those of the NbTiAl0.5Ny coatings. Furthermore, the NbTiAl0.5N14-CH12 coating (acetylene flux 12 sccm) had a DLC structure with enhanced adhesion properties and formed a carbon-rich transfer layer on the counterbody surface during sliding. The NbTiAl0.5N14-CH12 coating thus exhibited the best tribological properties among all the coatings.

原文English
頁(從 - 到)7928-7945
頁數18
期刊Journal of Materials Engineering and Performance
32
發行號17
DOIs
出版狀態Published - 2023 9月

All Science Journal Classification (ASJC) codes

  • 一般材料科學
  • 材料力學
  • 機械工業

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