Mechanical Properties Characterizations of Elastomer Pads and Control of a 3-DOF Rubber-Bearing Stage

Yu Cheng Chen, Chi An Chen, Kuo Shen Chen, Yun Hui Liu

研究成果: Conference contribution

摘要

As products are required with higher precision, vibration control becomes more important for precision machining and inspection. Controlled positioning stages with both fast positioning and relative vibration eliminated have been widely used as critical subsystems in precision manufacture and metrology. Recently, elastomeric bearings, which had been widely used in the seismic engineering, have been integrated into precision stage design due to their inherent stiffness anisotropy. With the incorporation of rubber bearing, stages can be designed to have the same function as these much larger compliant mechanisms-based designs. This provides possible advantages in the precision positioning. However, the behavior of elastomeric bearings depends on mechanical properties of materials, geometry, and operating conditions. It is important to perform essential characterization for fully taking the advantage of this approach. In this work, essential static and dynamic characterizations of elastomeric bearing structures are performed under different preloads and actuating frequencies. The stiffness, damping, and natural frequencies are evaluated. In parallel, a 3-DOF elastomeric bearing stage is design, realized, and controlled based on the characterized results. The experimental results indicate that it can achieve an 80 Hz controlling bandwidth and an 80 nm and 2urad travelling resolutions.

原文English
主出版物標題2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018
發行者Institute of Electrical and Electronics Engineers Inc.
頁面539-544
頁數6
ISBN(電子)9784907764609
DOIs
出版狀態Published - 2018 十月 15
事件57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018 - Nara, Japan
持續時間: 2018 九月 112018 九月 14

出版系列

名字2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018

Other

Other57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018
國家Japan
城市Nara
期間18-09-1118-09-14

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Control and Optimization
  • Instrumentation

指紋 深入研究「Mechanical Properties Characterizations of Elastomer Pads and Control of a 3-DOF Rubber-Bearing Stage」主題。共同形成了獨特的指紋。

  • 引用此

    Chen, Y. C., Chen, C. A., Chen, K. S., & Liu, Y. H. (2018). Mechanical Properties Characterizations of Elastomer Pads and Control of a 3-DOF Rubber-Bearing Stage. 於 2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018 (頁 539-544). [8492707] (2018 57th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/SICE.2018.8492707