Mechanical, tribological, anti-corrosion and anti-glass sticking properties of high-entropy TaNbSiZrCr carbide coatings prepared using radio-frequency magnetron sputtering

W. H. Kao, Y. L. Su, J. H. Horng, W. C. Wu

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

摘要

High-entropy TaNbSiZrCr carbide coatings were deposited on WC substrates by radio-frequency unbalanced magnetron sputtering with C2H2 flow rates ranging from 0 to 23 sccm. The microstructure, mechanical properties, tribological properties and anti-corrosion resistance of the coatings were analyzed in both an as-sputtered condition and an annealed condition. The anti-glass sticking performance of the coatings was additionally investigated by annealing the coatings at 750 °C for 1 h on BK7 glass plates. The results showed that the as-sputtered and annealed coatings with a low carbon content (i.e., C2H2 flow rates lower than 8 sccm) had a high hardness (>34.1 GPa). The as-sputtered sample deposited with the maximum C2H2 flow rate (23 sccm) showed the best tribological properties of all the as-sputtered samples. However, the wear rate of the coating increased by a factor of around 10 times after annealing. The annealed coating nevertheless exhibited the highest corrosion resistance of all the coatings. Finally, the glass sticking results showed that the use of an appropriate C2H2 flow rate (4–12 sccm) was beneficial in enhancing the anti-glass-sticking performance of the coatings.

原文English
文章編號124741
期刊Materials Chemistry and Physics
268
DOIs
出版狀態Published - 2021 八月 1

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學

指紋

深入研究「Mechanical, tribological, anti-corrosion and anti-glass sticking properties of high-entropy TaNbSiZrCr carbide coatings prepared using radio-frequency magnetron sputtering」主題。共同形成了獨特的指紋。

引用此