MEMS-based humidity sensor based on thiol-coated gold nanoparticles

Che Hsin Lin, Lung Ming Fu, Chia Yen Lee

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

A MEMS-based humidity sensor is proposed comprising thiol-coated gold nanoparticles (AuNPs) deposited on a glass substrate with aluminum interdigitated electrodes (IDEs). In the proposed device, the humidity is measured by monitoring the change in the device resistance as the water molecules are absorbed by the AuNPs. A highly sensitive sensing performance is obtained as a result of the large surface area of the AuNPs and the hydrophilic nature of the thiol coating. The experimental results show that the sensor has a time response of 10 s when the humidity is changed abruptly from 30%R.H. to 80%R.H. and a recovery time of 5 s when the humidity is restored to 30%R.H. In addition, it is shown that the sensor has a sensitivity of 2.83 kΩ/%R.H. over the humidity range of 20 ∼ 90%R.H. Finally, the sensor is shown to have good reliability (i.e., ±1.2%R.H.) over an extended period of 72 h.

原文English
主出版物標題9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
發行者Institute of Electrical and Electronics Engineers Inc.
頁面191-194
頁數4
ISBN(電子)9781479947270
DOIs
出版狀態Published - 2014 九月 23
事件9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 - Waikiki Beach, United States
持續時間: 2014 四月 132014 四月 16

出版系列

名字9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Other

Other9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
國家/地區United States
城市Waikiki Beach
期間14-04-1314-04-16

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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