MEMS-based MHz silicon ultrasonic nozzles for production of monodisperse drops

Y. L. Song, Chih H. Cheng, Ning Wang, Shirley C. Tsai, Yuan F. Chou, Ching T. Lee, Chen S. Tsai

研究成果: Conference contribution

摘要

This paper reports production of 4.5 μm-diameter monodisperse water drops using a micro electro-mechanical system (MEMS)-based 1 MHz 3-Fourier horn ultrasonic nozzle. The required electrical drive voltage for atomization was 6.5 V at 964+1 kHz that is in good agreements with the values obtained by impedance measurement and by the three-dimensional (3-D) simulation using a commercial finite element analysis program. Such small diameter drops with geometrical standard deviation (GSD) as small as 1.2 and 90% inhale-able fine particle fraction (<5.8 μm-diameter) were achieved in ultrasonic atomization for the first time. Therefore, the MEMS-based MHz ultrasonic nozzles should have potential application to targeted delivery of reproducible doses of medicine to the respiratory system.

原文English
主出版物標題Microelectromechanical Systems - Materials and Devices
頁面305-310
頁數6
出版狀態Published - 2008 六月 30
事件Microelectromechanical Systems - Materials and Devices - Boston, MA, United States
持續時間: 2007 十一月 262007 十一月 28

出版系列

名字Materials Research Society Symposium Proceedings
1052
ISSN(列印)0272-9172

Other

OtherMicroelectromechanical Systems - Materials and Devices
國家/地區United States
城市Boston, MA
期間07-11-2607-11-28

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學
  • 材料力學
  • 機械工業

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