MEMS residual stress characterization: Methodology and perspective

Kuo Shen Chen, Kuang Shun Ou

研究成果: Chapter

4 引文 斯高帕斯(Scopus)

指紋

深入研究「MEMS residual stress characterization: Methodology and perspective」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Chemical Compounds