Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes

Yi Ta Hsieh, Yung Chun Lee

研究成果: Conference contribution

2 引文 (Scopus)

摘要

This paper reports a novel process which is combine the contact metal transfer method and traditional photolithography process for fabricate nano-scale pattern sapphire substrate (NPSS) used in high brightness light emitting diodes (LEDs). The novel process can directly transfer a metal pattern onto the PR layer which above the sapphire substrate, the transferred metal pattern can as a perfect photo-mask for subsequent photolithography process. In this work, the high aspect ratio PR structures with the aspect ratio of 5 and line width of 500 nm are created by this novel process. Furthermore, the PR structure can as a etching mask for inductively coupled plasma (ICP) etching on the sapphire substrate. During the ICP etching, we successfully to obtain the NPSS with a perfect cone shape. Experiments have been demonstrate the feasibility of using this new approach for obtaining sub-micrometer surface structures on the complete surface area of a 2 inch and 4 inch sapphire substrates.

原文English
主出版物標題2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
頁面40-44
頁數5
DOIs
出版狀態Published - 2012 六月 1
事件7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
持續時間: 2012 三月 52012 三月 8

出版系列

名字2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Other

Other7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
國家Japan
城市Kyoto
期間12-03-0512-03-08

指紋

Photolithography
Sapphire
Light emitting diodes
Printing
Substrates
Metals
Plasma etching
Inductively coupled plasma
Aspect ratio
Masks
Surface structure
Linewidth
Cones
Luminance
Etching
Experiments

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

引用此文

Hsieh, Y. T., & Lee, Y. C. (2012). Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes. 於 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 (頁 40-44). [6196718] (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196718
Hsieh, Yi Ta ; Lee, Yung Chun. / Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes. 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. 頁 40-44 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).
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Hsieh, YT & Lee, YC 2012, Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes. 於 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012., 6196718, 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, 頁 40-44, 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, 12-03-05. https://doi.org/10.1109/NEMS.2012.6196718

Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes. / Hsieh, Yi Ta; Lee, Yung Chun.

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 40-44 6196718 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).

研究成果: Conference contribution

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Hsieh YT, Lee YC. Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes. 於 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 40-44. 6196718. (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196718