Method for evaluating reliance level of a virtual metrology system

Fan Tien Cheng, Yen Tung Chen, Yu Chuan Su, Deng Lin Zeng

研究成果: Conference contribution

11 引文 斯高帕斯(Scopus)

摘要

A method for evaluating reliance level of a virtual metrology system (VMS) is proposed. This method calculates a reliance index (RI) value between 0 and 1 by analyzing the process data of production equipment to decide if the virtual metrology result is reliable. A RI threshold is also defined in this method. If a RI value is higher than the threshold, the conjecture result is reliant; otherwise, the conjecture result needs to be further examined. In addition to the RI, the method also proposes process data similarity indexes (SIs). The SIs are defined to evaluate the degree of similarity between the input set of process data and those historical sets of process data used to establish the conjecture model. Two kinds of SIs are included in the method: global similarity index (GSI) and individual similarity index (ISI). Both the GSI and ISI are applied to assist the RI in gauging the reliance level and locating the key parameter(s) that cause major deviation, hence the VMS manufacturability problem is resolved. An illustrative example with 300-mm semiconductor foundry production equipment in Taiwan is demonstrated in this work. The real experimental results show that this method is applicable to the VMS of (such as semiconductor and TFT-LCD) production equipment.

原文English
主出版物標題2007 IEEE International Conference on Robotics and Automation, ICRA'07
頁面1590-1596
頁數7
DOIs
出版狀態Published - 2007
事件2007 IEEE International Conference on Robotics and Automation, ICRA'07 - Rome, Italy
持續時間: 2007 4月 102007 4月 14

出版系列

名字Proceedings - IEEE International Conference on Robotics and Automation
ISSN(列印)1050-4729

Other

Other2007 IEEE International Conference on Robotics and Automation, ICRA'07
國家/地區Italy
城市Rome
期間07-04-1007-04-14

All Science Journal Classification (ASJC) codes

  • 軟體
  • 人工智慧
  • 電氣與電子工程
  • 控制與系統工程

指紋

深入研究「Method for evaluating reliance level of a virtual metrology system」主題。共同形成了獨特的指紋。

引用此