Method for evaluating reliance level of a virtual metrology system in product manufacturing

貢獻的翻譯標題: 生產製程之虛擬量測系統之信心度的評估方法

Fan-Tien Cheng (Inventor)

研究成果: Patent

摘要

A method for evaluating reliance level of a virtual metrology system is disclosed. In this method, a reliance index (RI) and a RI threshold value are calculated by analyzing the process data of production equipment, thereby determining if the virtual metrology result is reliable. Besides, in this method, a global similarity index (GSI) and individual similarity indexes (ISI) are also provided for defining the degree of similarity between the current set of process data and all of the sets of historical process data used for establishing the conjecture model, thereby assisting the RI in gauging the degree of reliance and locating the key parameter(s) that cause major deviation.
原文English
專利號7593912
出版狀態Published - 2007 十二月 6

    指紋

引用此