Method for extracting Ge concentration of SiGe channel FinFET device using three-dimensional spectroscopic ellipsometry-optical critical dimension metrology
Chien Hung Chen, Ying Chien Fang, Chung Hao Chiang, Sheng-Yuan Chu
研究成果: Article › 同行評審
Chien Hung Chen, Ying Chien Fang, Chung Hao Chiang, Sheng-Yuan Chu
研究成果: Article › 同行評審