Method for extracting Ge concentration of SiGe channel FinFET device using three-dimensional spectroscopic ellipsometry-optical critical dimension metrology

Chien Hung Chen, Ying Chien Fang, Chung Hao Chiang, Sheng-Yuan Chu

研究成果: Article同行評審

指紋 深入研究「Method for extracting Ge concentration of SiGe channel FinFET device using three-dimensional spectroscopic ellipsometry-optical critical dimension metrology」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science