METHOD FOR MANUFACTURING AN OXIDE THIN FILM

貢獻的翻譯標題: 製造氧化物薄膜的方式

Jow-Lay Huang (Inventor), Jen-Sue Chen (Inventor), Jih-Jen Wu (Inventor)

研究成果: Patent

摘要

A method for manufacturing an oxide thin film comprises: providing a coating material composed of a first precursor material, a fuel material and a solvent; coating the coating material on a substrate; and annealing the coated coating material on the substrate to convert the coated coating material into an oxide thin film.
貢獻的翻譯標題製造氧化物薄膜的方式
原文English
專利號8821967
出版狀態Published - 1800

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