摘要
A method for manufacturing an oxide thin film comprises: providing a coating material composed of a first precursor material, a fuel material and a solvent; coating the coating material on a substrate; and annealing the coated coating material on the substrate to convert the coated coating material into an oxide thin film.
| 貢獻的翻譯標題 | 製造氧化物薄膜的方式 |
|---|---|
| 原文 | English |
| 專利號 | 8821967 |
| 出版狀態 | Published - 1800 |