Microfluidic flow meter and viscometer utilizing flow-induced vibration on an optic fiber cantilever

Po Yau Ju, Chien Hsiung Tsai, Lung-Ming Fu, Che Hsin Lin

研究成果: Conference contribution

17 引文 斯高帕斯(Scopus)

摘要

This paper presents a microfluidic flow sensor for the detections of velocity and viscosity, especially for ultra-low viscosity applications. An etched optic fiber with the diameter of 9 mm is embedded in a microfluidic chip to couple laser light into the microfluidic channel. An flow induced vibration causes periodic flapping motion of the optic fiber cantilever. Through the frequency analysis, the fluidic properties including the flow rate and the viscosity can be detected and identified. Results show that this developed sensor is capable of sensing liquid samples with the flow rates from 2.5 ml/min to 15.0 ml/min and the viscosities from 0.306 cP to 1.2 cP. In addition, air samples(0.0148 cP) with various flow rates can also be detected using the developed sensor. The developed flow sensor provides a simple and straight forward method for sensing flow characteristics in a microfluidic channel.

原文English
主出版物標題2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
頁面1428-1431
頁數4
DOIs
出版狀態Published - 2011 9月 1
事件2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
持續時間: 2011 6月 52011 6月 9

出版系列

名字2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
國家/地區China
城市Beijing
期間11-06-0511-06-09

All Science Journal Classification (ASJC) codes

  • 硬體和架構
  • 電氣與電子工程

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