Micromachined thermionic emitter

Dung Ching Perng, David A. Crewe, Sung B. Lee, Alan D. Feinerman

研究成果: Conference contribution


Arrays of sputtered tungsten thermionic emitters with different shapes have been fabricated. A single filament had an emission current of 10 nAmps and a one hour lifetime. The resistance of a filament decreased an order of magnitude with 25 minutes of annealing. After emission the filament appears to have recrystallized in the emitting area. The surface roughness of the recrystallized area strongly depends on the duration of annealing and emitting time. The variation of filament resistance during operation has been investigated. A thermionic emitter has been used as a source for a sub-cm electron optical column. An array of emitters could be used as a high resolution cathode ray tube if the supports are made from a low thermal conductivity material like glassy carbon with thermal conductivity of 10-3 watt/cm-K1.

主出版物標題Proceedings of SPIE - The International Society for Optical Engineering
發行者Publ by Int Soc for Optical Engineering
出版狀態Published - 1992 十二月 1
事件Imaging Technologies and Applications - Chicago, IL, USA
持續時間: 1992 三月 191992 三月 19


名字Proceedings of SPIE - The International Society for Optical Engineering


OtherImaging Technologies and Applications
城市Chicago, IL, USA

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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