Micrometer Level Control Design of Piezoelectric Actuators: Fuzzy Approach

In this investigation, a fuzzy-based micrometer level control design with a guaranteed trajectory tracking performance for piezoelectric actuators which naturally have hysteresis effects is proposed. Nominal dynamics of the controlled piezoelectric actuators are described by adopting Takagi and Sugeno fuzzy models initially. Via interpolating Takagi and Sugeno local fuzzy model, a robust fuzzy-based controller is developed to eliminate hysteresis, modeling uncertainties and external disturbances. Meanwhile, the tracking error is expected to be reduced as small as possible with respect to all bounded desired trajectories. This proposed fuzzy-based controller has an easy to implement control structure. The trajectory tracking design problem of piezoelectric actuators of this study is transferred to a linear matrix inequality problem, and based on the convex optimization technique, the solution of the trajectory tracking design problem of piezoelectric actuators can be solved efficiently. From the simulation results, it is obvious that this proposed fuzzy-based control design possesses robustness property and can converge tracking errors to zero in micrometer level.