Micropressure sensor fabrication without problem of stiction for a wider range of measurement

H. S. Ko, C. W. Liu, Chie Gau

研究成果: Article

11 引文 斯高帕斯(Scopus)

指紋 深入研究「Micropressure sensor fabrication without problem of stiction for a wider range of measurement」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy