Microstructural analysis of single crystal SiC prepared by novel liquid phase epitaxy

Sheng Chang Wang, Pramoda K. Nayak, You Ling Chen, James C. Sung, Jow Lay Huang

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

Single crystal SiC has been synthesized by a novel liquid phase epitaxy using mixture of (Sm:Co) as unique solvent. The synthesized high quality crystals have been characterized by field emission gun scanning electron microscopy and field emission gun transmission electron microscopy. The above analysis shows the epitaxial growth of single crystal SiC along [1 1 1] direction parallel to the Si wafer, followed by polycrystalline 3C-SiC and 6H-SiC whiskers. The formation mechanisms of single crystal SiC and SiC whiskers have been proposed.

原文English
頁(從 - 到)3671-3676
頁數6
期刊Ceramics International
37
發行號8
DOIs
出版狀態Published - 2011 十二月 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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