Microstructure investigation of SiC films synthesized from liquid phase in Sm-Co melts

Pei Ting Lee, Pramoda K. Nayak, Sheng Chang Wang, James C. Sung, Jow Lay Huang

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

摘要

Silicon carbide layers were grown on a Si substrate at a temperature below 1100 °C and pressure of 105Pa. The synthesis was carried out in a tube furnace through cyclic heating process using methane as a carbon source and Sm-Co mixed powder as a solvent. The growth of SiC from rare earth Sm-based solvent is an innovative approach, and Co can promote the formation of solvent during the growth process. The structural and compositional analyses were carried out using X-ray diffraction, electron probe micro-analyzer, scanning electron microscopy and transmission electron microscopy. Results indicated that β-SiC was successfully fabricated on Si (1 1 1) substrate. The heterogeneous nucleation of β-SiC was found to be observed initially at the edge of triangle-shaped sites on Si (1 1 1) surface that formed due to the existence of Co, and then grew and expanded to form β-SiC film. The growth process of SiC via vapour-liquid-solid mechanism was also discussed in this study.

原文English
頁(從 - 到)634-646
頁數13
期刊Superlattices and Microstructures
50
發行號6
DOIs
出版狀態Published - 2011 12月

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學
  • 電氣與電子工程

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