TY - JOUR
T1 - Microwave characteristics of thin-film passivation on ceramic substrate by using dc reactive magnetron sputtering
AU - Tai, Tzu Chun
AU - Wu, Hung Wei
AU - Wang, Yeong Her
AU - Chiu, Chen Te
N1 - Funding Information:
Manuscript received August 30, 2017; revised November 16, 2017; accepted December 17, 2017. Date of publication January 25, 2018; date of current version October 10, 2018. This work was supported by the Ministry of Science and Technology under Contract MOST 106-3011-E-168-001 and Contract MOST 106-2221-E-168-020. Recommended for publication by Associate Editor E. Liu upon evaluation of reviewers’ comments. (Corresponding authors: Hung-Wei Wu; Yeong-Her Wang.) T.-C. Tai and Y.-H. Wang are with the Department of Photonics, National Cheng Kung University, Tainan 701, Taiwan (e-mail: [email protected]).
Publisher Copyright:
© 2011-2012 IEEE.
PY - 2018/10
Y1 - 2018/10
N2 - This paper presents a novel method to change the dielectric constant and enhance the average power-handling capability (APHC) to a thin-film coplanar waveguide (CPW) line through dc reactive magnetron sputtering. This paper discusses the effects of material properties, microwave characteristics, and APHC on the thin-film CPW line. An aluminum nitride (AlN) thin film can be deposited on the surface of a ceramic substrate to provide a substrate with a smooth surface. Using the proposed thin-film passivation on the ceramic substrate can effectively improve the thermal conductivity and enhance the APHC of a thin-film CPW line. In a physical experiment, a thin-film CPW line with a 3-μm-thick AlN thin film was deposited on a 1000-μm-thick ceramic substrate. Microwave losses (including conductor loss αc(f) and dielectric loss αd(f)) dielectric constant and APHC were extracted from S-parameters that were measured up to 10 GHz. The method can be applied in ceramic fabrication processes, particularly in low-temperature cofired ceramic techniques.
AB - This paper presents a novel method to change the dielectric constant and enhance the average power-handling capability (APHC) to a thin-film coplanar waveguide (CPW) line through dc reactive magnetron sputtering. This paper discusses the effects of material properties, microwave characteristics, and APHC on the thin-film CPW line. An aluminum nitride (AlN) thin film can be deposited on the surface of a ceramic substrate to provide a substrate with a smooth surface. Using the proposed thin-film passivation on the ceramic substrate can effectively improve the thermal conductivity and enhance the APHC of a thin-film CPW line. In a physical experiment, a thin-film CPW line with a 3-μm-thick AlN thin film was deposited on a 1000-μm-thick ceramic substrate. Microwave losses (including conductor loss αc(f) and dielectric loss αd(f)) dielectric constant and APHC were extracted from S-parameters that were measured up to 10 GHz. The method can be applied in ceramic fabrication processes, particularly in low-temperature cofired ceramic techniques.
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U2 - 10.1109/TCPMT.2017.2787154
DO - 10.1109/TCPMT.2017.2787154
M3 - Article
AN - SCOPUS:85041013669
SN - 2156-3950
VL - 8
SP - 1800
EP - 1806
JO - IEEE Transactions on Components, Packaging and Manufacturing Technology
JF - IEEE Transactions on Components, Packaging and Manufacturing Technology
IS - 10
M1 - 8269386
ER -