Microwave characteristics of thin-film passivation on ceramic substrate by using dc reactive magnetron sputtering

Tzu Chun Tai, Hung Wei Wu, Yeong Her Wang, Chen Te Chiu

研究成果: Article

3 引文 斯高帕斯(Scopus)


This paper presents a novel method to change the dielectric constant and enhance the average power-handling capability (APHC) to a thin-film coplanar waveguide (CPW) line through dc reactive magnetron sputtering. This paper discusses the effects of material properties, microwave characteristics, and APHC on the thin-film CPW line. An aluminum nitride (AlN) thin film can be deposited on the surface of a ceramic substrate to provide a substrate with a smooth surface. Using the proposed thin-film passivation on the ceramic substrate can effectively improve the thermal conductivity and enhance the APHC of a thin-film CPW line. In a physical experiment, a thin-film CPW line with a 3-μm-thick AlN thin film was deposited on a 1000-μm-thick ceramic substrate. Microwave losses (including conductor loss αc(f) and dielectric loss αd(f)) dielectric constant and APHC were extracted from S-parameters that were measured up to 10 GHz. The method can be applied in ceramic fabrication processes, particularly in low-temperature cofired ceramic techniques.

頁(從 - 到)1800-1806
期刊IEEE Transactions on Components, Packaging and Manufacturing Technology
出版狀態Published - 2018 十月


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering