Mobility model extraction for surface roughness of SiGe along (110) and (100) Orientations in HKMG bulk FinFET devices

Chien Hung Chen, Yiming Li, Chieh Yang Chen, Yu Yu Chen, Sheng Chia Hsu, Wen Tsung Huang, Sheng Yuan Chu

研究成果: Article › 同行評審

13 引文 斯高帕斯（Scopus）

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy